2013年9月24日星期二

Easily peeled off from the substrate, especially compared to the environment when the film when wet

Because of its unique properties and broad application prospects, cubic boron nitride (cubicboronnitride, cBN) thin films have been functional materials is a hot research field. Currently cubic content (85%) of the boron nitride film by a variety of methods have been in the preparation of certain parameters obtained under the conditions. However, the resulting film generally has a very high stress, the thickness exceeds a specified value (about 300nm) a film is easily peeled off from the substrate, especially when the film when wet than their environment. However, in order to realize its practical application, the film thickness tends to be  Synthetic diamond , No.2 find the above 1μm. Therefore, if you can try a wide range of experimental parameters cubic boron nitride growth, will help select the appropriate  synthetic diamond powder , the thickness was prepared to meet the requirements, application-oriented film. Active self-bias-assisted RF magnetron sputtering target hexagonal boron nitride film was prepared in the working gas were investigated in nitrogen content of the substrate bias voltage and temperature on growth of cubic boron nitride. And reported for cubic boron nitride growth resulting experimental parameter range.

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